Why do we care so much about target bonding? This is important because a sputtering target that truly performs will allow greater process flexibility, and higher throughput. An introduction from Eliminating Bond Stresses of Sputtering Targets at Operating Temperatures:
“…It was observed that bonding with reactive multi-layer foil as a localized heat source allows use of higher temperature solders for joining target and backing plates for sputtering. This permits the use of higher power densities and higher operational temperatures, since the bond is generally the first part of the target assembly to fail at higher temperatures.
After learning that a condition of low stress can be set at ambient temperatures, it is a logical next step to explore setting a low stress point at other temperatures. If the theory is true, that a zero stress point could be set at operational temperature, then a sputtering target would be able to operate with no stress imparted by thermal expansion. This would allow higher sputtering power densities, which would result in an increase of throughput.”
Whenever two materials with different coefficient of thermal expansion values are bonded together, they will
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Here at Indium Corporation we use punch presses to die cut NanoFoil® for our
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Mike is working with NanoFoil®, getting ready to bond a small, round, planar sputtering target. He has prepared his backing plate and target material and is ready to assemble the stack after cutting a piece of
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